Presentation Information
[2P18]Field emission from Ga2O3 microparticles fixed on surface of Ga2O3 film
*Tomohiro Takei1, Tomomi Yoshimoto1,2 (1. Graduate School of Science and Engineering, Toyo University, 2. Bio-Nano Electronics Research Center, Toyo University)
In this study, Ga2O3 microparticles were attached to the surface of Ga2O3 film and the field emission properties of this structure were investigated. The Ga2O3 coating material was coated to a Si substrate. The Ga2O3 microparticles were sprayed on this surface using a sandblasting gun. The Ga2O3 microparticles were embedded in the Ga2O3 film, however part of the microparticles protrude from the surface. The protruding edges functioned as field emission electron source. The turn-on electric field was 1.9 V/um. Nonlinear F-N plots were observed. The low fluctuation rati of 0.032 was obtained at gentle slope region of F-N plots.