Presentation Information
[2P22]Influence of a Pd overlayer on grazing-incidence X-ray propagation in Al/Au bilayer thin films on Si wafer
*Tokujiro Yamamoto1, Koki Ueno2 (1. Utsunomiya University, 2. Graduate Student, Utsunomiya University)
Conventional methods for detecting metal–metal contact rely on nanoscale imaging or friction force microscopy. This study proposes an alternative approach using grazing-incidence X-rays near the total reflection critical angle. A Si wafer with Al/Au bilayers and a Pd overlayer was prepared and irradiated with Cu Kα or synchrotron X-rays while measuring emitted intensity. Changes in penetration depth and emission profiles were observed as incidence angles varied, particularly above Pd’s critical angle. These results suggest that this technique could detect the precise instant when a Pd-coated edge contacts an Al thin film surface.