Presentation Information
[2P31]Mie scattering ellipsometry system applying Python programming
*Yasuaki Hayashi1, Ryoichi Sugimori1, Shota Inoue1, Suguru Masuzaki2 (1. Yamato University, 2. National Institute for Fusion Science)
Mie-scattering ellipsometry has been developed for the analysis of the growth of fine particles in plasmas. In the measurement using a photometric-type ellipsometer, light intensity variation due to physical modulation is detected firstand then analyzed using the Fourier transform method to obtain ellipsometric parameters, Ψ and Δ. Computer-controlled mechanical rotation of a polarizer or compensator is a commonly used physical modulation method. To develop such a system, we used a single-board Raspberry Pi computer system (Pico) programmed in Python. We also carried out Python programming for the analysis of the variation of Ψ and Δ during fine-particle growth using a regression analysis method such as gradient descent method.