Presentation Information
[2P37]Performance Evaluation of Oxygen-Free Pd/Ti Evaporated NEG on Aluminum Substrate
*YU KANO1, Yuusuke masaoka1, Kenichi Hamanaka1, Manabu Yabe1 (1. IRIE KOKEN Co)
In fields like accelerators, electron microscopes, and photoelectron spectroscopy, there is demand for oil-free, noise-free, vibration-free, compact, energy-efficient, low-cost vacuum pumps that work in ultra-high vacuum environments (10^-7 Pa or less). Mase et al. at KEK developed a new non-evaporative getter (NEG) material using oxygen-free Pd/Ti deposition to meet these needs. After baking at 133C for 12 hours and returning to room temperature, the material effectively exhausts H2 and CO and maintains performance through repeated vacuum, baking, and air exposure cycles. Initially tested on stainless steel, we are now considering applying it to aluminum alloys for aerospace transport containers. Since aluminum alloys have a lower heat resistance (~150C), conventional NEG materials are unsuitable due to their high activation temperatures. However, oxygen-free Pd/Ti deposition can be reactivated below 150C, making it viable for aluminum. Additionally, aluminum's specific gravity is about one-third of stainless steel, offering weight reduction and lower transport costs. Thus, this study explores its application in aerospace container use.