Presentation Information
[2P48]Nanoscale compositional modulation in epitaxial Mg-doped ZnO films
*yuji matsumoto1, Yuta Sano1, Shingo Maruyama1, Kenichi Kaminaga1 (1. Tohoku University)
There has been a growing attention to the potential usefulness of the PLD system with a high-speed laser scanning galvano-mirror device that has been newly developed in our research group, and is now commercially available from Pascal Co. Ltd., a Japanese company dealing with vacuum products. This deposition system is purposefully designed for rapid deposition of complex multicomponent films. In the presentation, we will demonstrate how the PLD system is useful for deposition of Mg-doped ZnO films with their Mg compositions spatially modulated on a nanometer scale, according to which their optical and photo-electrochemical properties can be controlled.