Presentation Information
[3D05【Panel discussion】]Discussion on the performance expectations for Next-generation electron sources in commercial electron beam instruments
*Soichiro Matsunaga1,2 (1. Open Business Promotion Dept., Hitachi High-Tech Corporation, 2. R&D Group, Hitachi Ltd.)
Electron beam instruments, including electron microscopes and X-ray analytical devices, are essential technologies that drive modern industry. In addition, highly accelerated charged particle beam systems are employed as powerful analytical tools for exploring the fundamental principles of physical chemistry. These instruments play a crucial role in both industrial and academic fields, and it is no exaggeration to say that their performance is largely determined by the quality of the electron source. To address this topic, we have organized a panel discussion featuring developers of electron beam instruments. The panel will explore the current state of electron sources and discuss expectations from academia regarding next-generation electron sources. We warmly encourage active participation and questions from the audience to enrich the discussion.