[3D06-09] Semiconductor/Magnetic, Electronic, and Photonic devices/Electronic Material Processing (EMP/MI/MS)

2:30 PM - 2:45 PM JST(5:30 AM - 5:45 AM UTC)

[3D09] Development of time-resolved scanning electron microscopy to study potential dynamics of semiconductor devices

*yusuke arashida¹, Nikoraigaku Okamoto¹, Kensuke Miura¹, Samuel Jeong¹, Shoji Yoshida¹, Jun-ichi Fujita¹ (1. University of Tsukuba)

We depeloped an ultrafast time-resolved SEM which can visualize ultrafast change of electric potential on metal and semiconductor simultaneously, which is expected to be applicable to direct elucidation of the operation of high-speed electronic devices.

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