Presentation Information
[3G10]Surface acoustic wave imaging using Brillouin microscopy
*Morten Bertz1, Igor Kudryashov1, Dmitry Derevyanchuk1, Yasushi Morihira1, Kenichi Kawamura1 (1. Tokyo Instruments, Inc.)
Surface Brillouin scattering is used to non-destructively study elastic properties of thin films by analyzing surface acoustic wave (SAW) velocities. Traditionally limited by slow data collection, we introduce a novel optical setup that enables rapid, high-quality imaging using surface Brillouin scattering. By mapping SAW and bulk acoustic wave (BAW) signals of SiO2 layers of varying thickness, we observed distinct shifts in acoustic modes, revealing local differences in material properties. This method allows for broader sample compatibility and detailed microscale analysis of elastic properties, uniformity, and stress distributions in thin films.