[3E12-16] Surface Analysis

1:15 PM - 1:45 PM JST(4:15 AM - 4:45 AM UTC)

[3E12【依頼講演】] Energy scale calibration, Auger parameter evaluation, and recoil effects in laboratory-based hard x-ray photoelectron spectroscopy

*Shinya Otomo¹, Shinsuke Nishida¹ (1. Fundamental Technology Laboratory, Furukawa Electric Co., Ltd. (Japan))

Conventional x-ray photoelectron spectroscopy (XPS) using Mg Kα or Al Kα radiation is often limited to surface-sensitive analysis because subsurface regions are covered with contamination layers and native oxides. Hard x-ray photoelectron spectroscopy (HAXPES) overcomes this limitation by providing large information depth and access to deep core levels. Because HAXPES is still in the early stages of commercialization and standardization, reliable energy-scale calibration is essential for data comparability. In this presentation, the energy-scale calibration and linearity of a laboratory-based HAXPES system equipped with monochromated Al Kα and Cr Kα sources were evaluated using Au, Ag, and Cu reference materials. Long-term monitoring demonstrated stable calibration performance, while Ag core-level and Auger peaks were used to assess linearity. Challenges in energy-scale calibration, Auger parameter evaluation, and recoil-induced energy shifts are also discussed.

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