Process monitoring and laser processing for devices

11:30 AM - 11:45 AM JST(2:30 AM - 2:45 AM UTC)

[D9-23a-I-04] レーザー炭化による細線構造の直接描画と回折光学素子への応用

*Yosuke Kondo¹, Mitsuhiro Terakawa^1,2 (1. Grad. Sch. Keio Univ., 2. Keio Univ.)