[A-1] Advanced CMOS: Process Technology

2:30 PM - 3:00 PM JST(5:30 AM - 6:00 AM UTC)Invited

[A-1-01 (Invited)] 3D stacked devices and MOL innovations for post-Nanosheet CMOS scaling

〇Steven Demuynck¹、Victor Vega Gonzalez¹、Camila Toledo¹、Karen Stiers¹、Cassie Sheng¹、Andy Peng¹、Dmitry Batuk¹、Maryam Hosseini¹、Anne Vandooren¹、Lucas Lima¹、Naoto Horiguchi¹、Serge Biesemans¹ (1. imec (Belgium))

DOI:

https://doi.org/10.7567/SSDM.2024.A-1-01

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