Presentation Information
[A-1-02]Source-Drain Damage of Monolithic Complementary Field Effect Transistors: A Comprehensive Study of Failure Modes and Mitigation Strategies
〇Camila Toledo de Carvalho Cavalcante1, Steven Demuynck1, Emmanuel Dupuy1, Thomas Chiarella1, BT Chan1, Pallavi Puttarame Gowda1, Il Gyo Koo1, Hans Mertens1, Anne Vandooren1, Farid Sebaai1, Jef Geypen1, Sujith Subramanian1, Lucas Petersen Barbosa Lima1, Serge Biesemans1, Naoto Horiguchi1 (1. imec, Leuven, Belgium (Belgium))