[A-1] Advanced CMOS: Process Technology

3:30 PM - 3:45 PM JST(6:30 AM - 6:45 AM UTC)

[A-1-04] Low-Thermal Budget Activation for 3D Integration by Green Nanosecond Laser

〇Hongxu Liao¹, Yandong Ge¹, Haixia Li¹, Lanyi Xie², Qing Wang¹, Ming Li^1,3, Ru Huang^1,3 (1. School of Integrated Circuits, Peking University (China), 2. Department of Energy and Resources Engineering, Peking University (China), 3. Beijing Advanced Innovation Center for Integrated Circuits (China))

DOI:

https://doi.org/10.7567/SSDM.2024.A-1-04

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