2024 International Conference on Solid State Devices and Materials
Sep 1 - Sep 4, 2024Arcrea HIMEJI
2024 International Conference on Solid State Devices and Materials
Sep 1 - Sep 4, 2024Arcrea HIMEJI
[A-2-02]1T EUV/DUV Detector in Fully Compatible 16nm FinFET Logic Process
〇Wei-Hwa Lin1, Ting-Kai Huang2, Yue-Der Chih3, Yih Wang3, Jonathan Chang3, Ya-Chin King1, Chrong Jung Lin1,2(1. Institute of Electronics Engineering, National Tsing Hua Univ. (Taiwan), 2. College of Semiconductor Research, National Tsing Hua Univ. (Taiwan), 3. Design Technology Platform, Taiwan Semiconductor Manufac. Company (Taiwan))
A novel 1T EUV/DUV light detector with W/L of 2/1.38 mm pitch and high spectral resolution is investigated and proposed by using TSMC’s 16nm FinFET CMOS logic technology. The proposed 1T detector can conduct on-wafer powerless detection and non-volatile storage for the sensed data. In addition, a new model for sensitivity calibration is firstly proposed to precisely calculate the sensitivity of this high resolution detector. Based on the characterization result in this paper, the novel 1T detector is a promising solution to be a highly efficient in-line monitoring devices in EUV (13.5nm) and DUV (>193nm) lithography systems.