[A-2] Innovative devices and Sensing technology

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[A-2-02] 1T EUV/DUV Detector in Fully Compatible 16nm FinFET Logic Process

〇Wei-Hwa Lin¹, Ting-Kai Huang², Yue-Der Chih³, Yih Wang³, Jonathan Chang³, Ya-Chin King¹, Chrong Jung Lin^1,2 (1. Institute of Electronics Engineering, National Tsing Hua Univ. (Taiwan), 2. College of Semiconductor Research, National Tsing Hua Univ. (Taiwan), 3. Design Technology Platform, Taiwan Semiconductor Manufac. Company (Taiwan))

DOI:

https://doi.org/10.7567/SSDM.2024.A-2-02

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