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Low-temperature annealing effect on electrical/structural characteristics for SiO<sub>2</sub>/GeO<sub>2</sub>/Ge gate stack

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Advanced CMOS: Device Technology

2024 International Conference on Solid State Devices and Materials

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[A-4-04 (Late News)]Low-temperature annealing effect on electrical/structural characteristics for SiO₂/GeO₂/Ge gate stack

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[A-4-04 (Late News)]Low-temperature annealing effect on electrical/structural characteristics for SiO2/GeO2/Ge gate stack

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[A-4-04 (Late News)]Low-temperature annealing effect on electrical/structural characteristics for SiO₂/GeO₂/Ge gate stack