Presentation Information
[A-6-05]Assessment and optimization of the cascaded transistor method for the direct extraction of access resistance components in FinFET and NSFET devices.
〇Pierre Eyben1, An De Keersgieter1, Philippe Matagne1, Hans Mertens1, Thomas Chiarella1, Clément Porret Porret1, Camila Toledo de Carvalho Cavalcante1, Yong Kong Siew1, Jerome Mitard1, Naoto Horiguchi1 (1. Imec (Belgium))