[A-7] Advanced CMOS: CFET

1:30 PM - 2:00 PM JST(4:30 AM - 5:00 AM UTC)Invited

[A-7-01 (Invited)] Realization of CMOS Operation in 3-Dimensional Stacked FET with Self-Aligned Direct Backside Contact

〇Juhun Park¹, Jaehyun Park¹, Jejune Park¹, Kyuman Hwang¹, Jinchan Yun¹, Dahye Kim¹, Sungil Park¹, Jinwook Yang¹, Jae Won Jeong¹, Chuljin Yun¹, Jinho Bae¹, Daihong Huh¹, Deukho Yeon¹, Sanghyeon Kim¹, Seungeun Baek¹, Soomin Son¹, Junghan Lee¹, Tae-sun Kim¹, Seungjun Lee¹, Sun-Jung Lee¹, Sang Wuk Park¹, Bong Jin Kuh¹, Daewon Ha¹, Sangjin Hyun¹, Su Jin Ahn¹, Jaihyuk Song¹ (1. Samsung Electronics Co., Ltd. (Korea))

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