[B-4] Ferroelectric Memory Devices

11:45 AM - 12:00 PM JST(2:45 AM - 3:00 AM UTC)

[B-4-05] Comparative Studies of Thermal Stability Between Back-End-of-Line Superlattice and Solid Solution Hf_0.5Zr_0.5O₂ Ferroelectric Memories on Ferroelectricity and Switching Dynamics

〇Cheng-Hung Wu¹, Tsung-Ying Lin², Chun-Jung Su^2,3, Vita Pi-Ho Hu¹ (1. National Taiwan Univ. (Taiwan), 2. National Yang Ming Chiao Tung Univ. (Taiwan), 3. Taiwan Semiconductor Research Inst. (Taiwan))

DOI:

https://doi.org/10.7567/SSDM.2024.B-4-05

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