Presentation Information
[B-4-06]50× Endurance Improvement for HfO2-based Ferroelectric Capacitor Utilizing Hybrid Recovery Scheme
〇Zhuohua Tang1,3, Wanwang Yang1,3, Xujin Song1,3, Haotong Zhu1,3, Nan Tang1,3, Haozhang Yang1,3, Yulin Feng2, Zheng Zhou1,3, Jinfeng Kang1,3, Peng Huang1,3 (1. Peking Univ. (China), 2. Beijing Info. Sci. and Tech. Univ. (China), 3. Beijing Advanced Innovation Center for Integrated Circuits (China))