Presentation Information
[B-6-02]Optical Emission Spectrum Feature-based Machine Learning Technology for Monitoring High Aspect Ratio Contact Etching-induced Defects of 3D NAND Flash Memory
〇Byung Yong Choi1, Gae-won You1, Deokwon Sim1, Jongik Hong1, Hyun Soo Lee1, Jonghyun Kim1, Sangwon Baek1, Won Jun Choi1, Minsun Ryu1, Seungyoon Kim1, Hoyun Jung1, Jun Haeng Lee1, Sung-Il Cho1, Mincheol Park1, Bong-Tae Park1, Sung Hoi Hur1 (1. Samsung Electronics Co., Ltd. (Korea))