Presentation Information
[B-6-03]Analysis of Mechanical Stress Induced in Multi-Stack and Number of Wordlines of 3D NAND Flash Memory
〇Donghyun Kim1, Kihoon Nam1, Chanyang Park1, Jiyoon Kim1, Jinsu Jung1, Sanguk Lee1, Yunsu Kim2, Seongjo Park2, Rock-Hyun Baek1 (1. Pohang Univ. of Science and Technology (Korea), 2. SK hynix Inc. (Korea))