Presentation Information
[B-6-04]First Demonstration of 3D Stacked FeFET Memory Devices with Vertical IGZO Channel-Last Process for Dense Non-Volatile Memory
〇Roman Izmailov1,2, Nicolò Ronchi1, Jie Li1, Mihaela Ioana Popovici1, Kostantine Katcko1, Zhuo Chen1,2, Laurent Breuil1, Nina Bazzazian1, Kaustuv Banerjee1, Iuliana Rachita1, Geert Van den bosch1, Maarten Rosmeulen1, Jan Van Houdt1,2 (1. imec (Belgium), 2. KU Leuven (Belgium))