Presentation Information
[B-7-03]Room temperature produced chalcogenide superlattices on 300 mm wafer for interfacial phase-change memory
〇Yusuke Miyaguchi1, Kazumasa Horita1, Takehito Jimbo1, Takeshi Masuda1, Shutaro Asanuma2, Noriyuki Miyata2, Junji Tominaga2 (1. ULVAC, Inc. (Japan), 2. AIST (Japan))