[B-8] Ferroelectric FET

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[B-8-04] Integration of Phase Change (Ge₂Sb₂Te₅) Liner Stressor on Ferroelectric Capacitors and FeFETs: Simulation and Electrical Characterization

〇Yaxuan Yuan¹, Xueyang Li¹, Xinze Li¹, Bing Chen², Dawei Gao³, Genquan Han², Ran Cheng¹ (1. The Univ. of Zhejiang (China), 2. The Univ. of Xidian (China), 3. The Corp. of Zhejiang ICsprout Semiconductor (China))

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