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Implementation of Ge N-channel FeFET Memory with Al<sub>2</sub>O<sub>3</sub>/AlN Interfacial Layer by Microwave Annealing

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Ferroelectric FET

2024 International Conference on Solid State Devices and Materials

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[B-8-05 (Late News)]Implementation of Ge N-channel FeFET Memory with Al₂O₃/AlN Interfacial Layer by Microwave Annealing

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[B-8-05 (Late News)]Implementation of Ge N-channel FeFET Memory with Al2O3/AlN Interfacial Layer by Microwave Annealing

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[B-8-05 (Late News)]Implementation of Ge N-channel FeFET Memory with Al₂O₃/AlN Interfacial Layer by Microwave Annealing