[C-4] Advanced integration

11:15 AM - 11:30 AM JST(2:15 AM - 2:30 AM UTC)

[C-4-02] Development of Hybrid Bonding Using Area-Selective Passivation Layer Deposition Technology on Various Substrates for Heterogeneous Integrated Structure

〇Wen-Tzu Tsai¹, Mu-Ping Hsu¹, Yi-Hsuan Chen¹, Yuan-Chiu Huang¹, Kuan-Neng Chen¹ (1. National Yang Ming Chiao Tung Univ. (Taiwan))

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