Presentation Information
[C-4-03]Large-Area Single-Crystal Ge Using Elevated Epitaxy Technique for Monolithic 3D Integration
〇Yu-Ming Pan1,2, Huan-Yu Chiu1, Nien-Chih Lin2, Hao-Tung Chung1, Bo-Jheng Shih1, Chiao-Yen Wang1, Chih-Chao Yang2, Po-Tsang Huang1, Chang-Hong Shen2, Po-Jung Sung2, Wen-Fa Wu2, Kuan-Neng Chen1, Chenming Hu1,3 (1. National Yang Ming Chiao Tung University (Taiwan), 2. Taiwan Semiconductor Research Institute (Taiwan), 3. University of California, Berkeley (United States of America))