[C-5] Advanced Metallization II

9:30 AM - 9:45 AM JST(12:30 AM - 12:45 AM UTC)

[C-5-03] Material Parameter Extraction Method at Low Temperature With Simple Measurement and 3D Electromagnetic Analysis

〇Taiga Fukumori^1,2, Norinao Kouma^1,2, Yoshiyasu Doi^1,2, Shintaro Sato^1,2 (1. Fujitsu Ltd. (Japan), 2. RIKEN Center for Quantum Computing (Japan))

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