[C-5] Advanced Metallization II

9:45 AM - 10:00 AM JST(12:45 AM - 1:00 AM UTC)

[C-5-04] Introduction of thick AlN coating on Si for 3D-IC thermal management

〇Takeki Ninomiya¹, Takeshi Takagi¹, Masakazu Mori², Masaaki Niwa¹, Tadahiro Kuroda¹ (1. The Univ. of Tokyo (Japan), 2. Ryukoku Univ. (Japan))

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