Presentation Information
[K-2-02]PEALD IGZO TFT Implemented Inverters and Ring Oscillators Suitable for Backend-of-Line Functional Circuits
〇Wenhui Wang1, Meishan Zhang1, Jun Lan1, Xuewei Feng2, Panpan Zhang3, Kai Chen1, Mei Shen1, Feichi Zhou1, Longyang Lin1, Yida Li1 (1. Southern University of Science and Technology (China), 2. Shanghai Jiao Tong University (China), 3. Beijing University of Posts and Telecommunications (China))