[K-7] Ferroelectric Materials and Late News

1:30 PM - 1:45 PM JST(4:30 AM - 4:45 AM UTC)

[K-7-01] An Ultra-thin Hf1-xZrxO2 (4nm) Processing for a Low Thermal Budget (350℃) but Promising Ferroelectricity

〇Chia-Wei Hsu¹, Jia-Hua Jhang¹, Zheng-Lin Yang¹, Chih-Yu Teng¹, Yuan-Chieh Tseng¹ (1. National Yang Ming Chiao Tung Univ. (Taiwan))

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