Presentation Information
[K-7-06 (Late News)]Optimization of deposition conditions and Improvement of H2 gas sensor characteristics of porous a-IGZO by applying machine learning
〇Atsushi Shimizu1, Keisuke Ide1, Takayoshi Katase1, Hidenori Hiramatsu1, Hideo Hosono1, Toshio Kamiya1 (1. Tokyo Inst. of Tech. (Japan))