[M-1] Oxide Materials

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[M-1-02] Effects of Millisecond Flash Lamp Annealing on the Polarization and Crystallization in Thin Al:HfO₂ Films

〇Hideaki Tanimura^1,2, Tomoya Mifune¹, Yuma Ueno², Shinichi Kato², Takumi Mikawa², Hironori Fujisawa¹, Seiji Nakashima¹ (1. Univ. of Hyogo (Japan), 2. SCREEN Semiconductor Solutions (Japan))

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