Presentation Information
[M-1-02]Effects of Millisecond Flash Lamp Annealing on the Polarization and Crystallization in Thin Al:HfO2 Films
〇Hideaki Tanimura1,2, Tomoya Mifune1, Yuma Ueno2, Shinichi Kato2, Takumi Mikawa2, Hironori Fujisawa1, Seiji Nakashima1 (1. Univ. of Hyogo (Japan), 2. SCREEN Semiconductor Solutions (Japan))