Presentation Information
[M-1-04]Layer-by-layer Synthesis of Functional Oxides by Digitally Processed DC Sputtering with Alternating Surface Oxidation
〇Hideo Isshiki1, Daiki Yamashita1, Mehdi Ali1, Masaya Takeuchi1, Taiga Hokkezu1, Yuki Takamatsu1, Shoji Kiyota1, Satoshi Fujiya1, Yasuhito Tanaka1,2, Shinichiro saisho1,2 (1. The University of Electro-Communications (Japan), 2. Shincron Co.Ltd. (Japan))