[M-1] Oxide Materials

3:30 PM - 3:45 PM JST(6:30 AM - 6:45 AM UTC)

[M-1-04] Layer-by-layer Synthesis of Functional Oxides by Digitally Processed DC Sputtering with Alternating Surface Oxidation

〇Hideo Isshiki¹, Daiki Yamashita¹, Mehdi Ali¹, Masaya Takeuchi¹, Taiga Hokkezu¹, Yuki Takamatsu¹, Shoji Kiyota¹, Satoshi Fujiya¹, Yasuhito Tanaka^1,2, Shinichiro saisho^1,2 (1. The University of Electro-Communications (Japan), 2. Shincron Co.Ltd. (Japan))

DOI:

https://doi.org/10.7567/SSDM.2024.M-1-04

Password required to view