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Study of the Dependence of Effective Barrier Height on Thickness of HfO2, SiO2, Y2O3, and Al2O3 Films in Metal-Ultra-Thin-Insulator-Germanium Structures

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Oxide Materials

2024 International Conference on Solid State Devices and Materials

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[M-1-05 (Late News)]Study of the Dependence of Effective Barrier Height on Thickness of HfO₂, SiO₂, Y₂O₃, and Al₂O₃ Films in Metal-Ultra-Thin-Insulator-Germanium Structures

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[M-1-05 (Late News)]Study of the Dependence of Effective Barrier Height on Thickness of HfO2, SiO2, Y2O3, and Al2O3 Films in Metal-Ultra-Thin-Insulator-Germanium Structures

DOI:

Password required to view

[M-1-05 (Late News)]Study of the Dependence of Effective Barrier Height on Thickness of HfO₂, SiO₂, Y₂O₃, and Al₂O₃ Films in Metal-Ultra-Thin-Insulator-Germanium Structures