Presentation Information
[M-4-04]Improvement of Fabrication Process for Top-down GaN Nanowires Using Contactless Photo-assisted Electrochemical Etching
〇Hisahiro Furuuchi1,2, Taketomo Sato2, Junichi Motohisa1,2 (1. Graduate School of Info. Sci. and Tech., Hokkaido Univ. (Japan), 2. Res. Center for Integrated Quantum Electronics, Hokkaido Univ. (Japan))