[PS-01] 01: Advanced CMOS: Material Science / Process Engineering / Device Technology

[PS-01-01] A Novel Self-Aligned Backside Contact Architecture for Advanced Logic Nodes

〇QingPeng Wang¹, Sumant Sarkar², TaeYeon Oh³ (1. Lam Research (China), 2. Lam Research (United States of America), 3. Lam Research (Korea))

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