[PS-01] 01: Advanced CMOS: Material Science / Process Engineering / Device Technology

[PS-01-01] A Novel Self-Aligned Backside Contact Architecture for Advanced Logic Nodes

〇QingPeng Wang¹, Sumant Sarkar², TaeYeon Oh³ (1. Lam Research (China), 2. Lam Research (United States of America), 3. Lam Research (Korea))

DOI:

https://doi.org/10.7567/SSDM.2024.PS-01-01

Password required to view