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Germanium Gate Stack Fabrication at Low Temperature<br />using Nonheated Atomic Layer Deposition

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01: Advanced CMOS: Material Science / Process Engineering / Device Technology

2024 International Conference on Solid State Devices and Materials

Presentation Information

[PS-01-02]Germanium Gate Stack Fabrication at Low Temperature
using Nonheated Atomic Layer Deposition

DOI:

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Presentation Information

[PS-01-02]Germanium Gate Stack Fabrication at Low Temperatureusing Nonheated Atomic Layer Deposition

DOI:

Password required to view

[PS-01-02]Germanium Gate Stack Fabrication at Low Temperature
using Nonheated Atomic Layer Deposition