Presentation Information
[PS-01-11]Comprehensive Study on the Frequency Stability Characteristics of HfO2-ZrO2 Superlattice Ferroelectric Films
〇Qiuxia Wu1, Yue Peng1, Mingshuang Kang1, Chunfu Zhang1, Xiaohua Ma1, Yue Hao1 (1. Wide Bandgap Semiconductor Tech. Disciplines State Key Lab., School of Microelectronics, Xidian Univ. (China))