Presentation Information
[PS-01-13]Texture of Orthorhombic ScSi in Annealed TiN / Sc / Si(:P)(001) Contact Stacks
〇Bert Pollefliet1, Clement Porret2, Christophe Detavernier3, Jean-Luc Everaert2, Kiroubanand Sankaran2, Erik Rosseel2, Roger Loo2, André Vantomme1, Clement Merckling1 (1. KU Leuven (Belgium), 2. imec (Belgium), 3. Ghent University (Belgium))