[PS-01] 01: Advanced CMOS: Material Science / Process Engineering / Device Technology

[PS-01-15] Analysis of AC Degradation in SiON pMOSFET by Extraction of Threshold Voltage Degradation Profile

〇Donghee Son¹, Yeohyeok Yun² (1. Samsung Electronics (Korea), 2. Korea University of Technology and Education(KOREATECH) (Korea))

DOI:

https://doi.org/10.7567/SSDM.2024.PS-01-15

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