Presentation Information
[PS-11-04]Thermal scanning probe lithography assisted broadband silicon photodetectors
yang Xu1, 〇Zongwen Li1, Zishun Li2, Qianqian Zhang1, Yunfei Xie1, Feng Tian1, Muhammad Abid Anwar1, Srikrishna Chanakya Bodepudi1, Zhi-Xiang Zhang1, Jian Chai1, Xiaorui Zheng2, Huan Hu1, Bin Yu1, Yang Xu1 (1. Zhejiang Univ. (China), 2. Westlake Univ. (China))