[SO-PS-02] 02: Advanced and Emerging Memories / New Applications

1:30 PM - 1:32 PM JST(4:30 AM - 4:32 AM UTC)

[SO-PS-02-01] Ozone SiO₂/HfO₂ Interface Engineering for Performance and Reliability Optimization of Hf_0.5Zr_0.5O₂ FeFETs: Device Integration and Electrical Investigation

〇Xueyang Li¹, Yaxuan Yuan¹, Chengji Jin², Xinze Li¹, Xiao Yu², Ran Cheng¹, Genquan Han³ (1. The Univ. of Zhejiang (China), 2. The Lab. of Zhejiang (China), 3. The Univ. of Xidian (China))

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