[SO-PS-02] 02: Advanced and Emerging Memories / New Applications

1:32 PM - 1:34 PM JST(4:32 AM - 4:34 AM UTC)

[SO-PS-02-02] Analysis of reliability improvement in HfO₂-based ferroelectric capacitorsby ozone oxidation of the bottom electrode

〇Yuki Itoya¹, Takuya Saraya¹, Toshiro Hiramoto ¹, Masaharu Kobayashi ^1,2 (1. Univ. Tokyo Inst. Indus. Sci. (Japan), 2. Univ. Tokyo d.lab (Japan))

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