Presentation Information
[SO-PS-02-12]Analysis of Cell Characteristics depending on Vertical Channel Profile and Multiple Dielectric WL Spacer in 3D NAND Flash Memory
Daewoong Kang1, 〇Gwansun Choi1,2, Minkyo Suh1,2, Chaeyeon Jung1,3, Youngho Jung4 (1. Seoul National University (Korea), 2. Chung-Ang University (Korea), 3. Soongsil Univ. (Korea), 4. Daegu University (Korea))