Presentation Information
[SO-PS-02-25]HfO2-ZrO2 Superlattice Ferroelectric FinFET with Low-Temperature Poly-Siusing Green Laser Crystallization for BEOL applications
〇Chen-You Wei1、Yung-Teng Fang2、Yi-Ju Yao1、Chih-Chao Yang3、Fu-Ju Hou3、Guang-Li Luo3、Yung-Hsien Wu2、Yung-Chun Wu2 (1. College of Semiconductor Research, National Tsing Hua University (Taiwan)、2. Department of Engineering and System Science, National Tsing Hua University (Taiwan)、3. Taiwan Semiconductor Research Institute (Taiwan))