[SO-PS-02] 02: Advanced and Emerging Memories / New Applications

2:18 PM - 2:20 PM JST(5:18 AM - 5:20 AM UTC)

[SO-PS-02-25] HfO₂-ZrO₂ Superlattice Ferroelectric FinFET with Low-Temperature Poly-Siusing Green Laser Crystallization for BEOL applications

〇Chen-You Wei¹、Yung-Teng Fang²、Yi-Ju Yao¹、Chih-Chao Yang³、Fu-Ju Hou³、Guang-Li Luo³、Yung-Hsien Wu²、Yung-Chun Wu² (1. College of Semiconductor Research, National Tsing Hua University (Taiwan)、2. Department of Engineering and System Science, National Tsing Hua University (Taiwan)、3. Taiwan Semiconductor Research Institute (Taiwan))

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