[SO-PS-03] 03: Heterogeneous and 3D Integration / Interconnect / MEMS

1:30 PM - 1:32 PM JST(4:30 AM - 4:32 AM UTC)

[SO-PS-03-01] Investigation of Propagation Directions on GaN Surface Acoustic Wave Resonators Toward Wide Temperature Range Applications

〇Guofang Yu¹, Renrong Liang¹, Jun Fu¹, Jun Xu¹, Tian-Ling Ren¹, Jingqing Du², Di Zhao² (1. Tsinghua Univ. (China), 2. Beijing Sevenstar Flow Corp., Ltd. (China))

DOI:

https://doi.org/10.7567/SSDM.2024.PS-03-01

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