[SO-PS-03] 03: Heterogeneous and 3D Integration / Interconnect / MEMS

1:32 PM - 1:34 PM JST(4:32 AM - 4:34 AM UTC)

[SO-PS-03-02] Improvement of Uniformity by Face-to-Face Ultra-High-Pressure Annealing Observed by Scanning Internal Photoemission Microscopy Using Au/Ni/n-GaN Schottky Contacts

〇Kenji Shiojima¹, Yasuho Matsumoto¹, Hiroki Imabayashi¹, Tetsu Kachi² (1. Univ. of Fukui (Japan), 2. Nagoya Univ. (Japan))

DOI:

https://doi.org/10.7567/SSDM.2024.PS-03-02

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