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A Study of Heteroepitaxial Single Crystal β-Ga<sub>2</sub>O<sub>3</sub> δ-doped MESFET on C-plane Sapphire by Mist-CVD

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04: Power / High‐speed Devices and Materials

2024 International Conference on Solid State Devices and Materials

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[SO-PS-04-06]A Study of Heteroepitaxial Single Crystal β-Ga₂O₃ δ-doped MESFET on C-plane Sapphire by Mist-CVD

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[SO-PS-04-06]A Study of Heteroepitaxial Single Crystal β-Ga2O3 δ-doped MESFET on C-plane Sapphire by Mist-CVD

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[SO-PS-04-06]A Study of Heteroepitaxial Single Crystal β-Ga₂O₃ δ-doped MESFET on C-plane Sapphire by Mist-CVD