[SO-PS-04] 04: Power / High‐speed Devices and Materials

1:56 PM - 1:58 PM JST(4:56 AM - 4:58 AM UTC)

[SO-PS-04-14] Effect of Al₂O₃ deposition temperature on the electrical properties of Al₂O₃/β-Ga₂O₃ (001) metal oxide semiconductor capacitors

〇qihao zhang¹, Dongyuan Zhai¹, Hui Li¹, Min He¹, Jiwu Lu¹ (1. The Univ. of Hunan (China))

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